Edwards ext70h manual

This manual provides installation, operation and maintenance instructions for the Edwards EXT70H 24 V, EXT70Hi 24 V, EXTH 24 V and EXTHi 24 V Compound Molecular Pumps. These pumps must be used as specified. The units used throughout this manual conform to the SI international system of units of measurement. Description The EXDC controls the electrical supply for an Edwards EXT70, EXT70H, EXT, EXTH, EXT or EXT turbomolecular pump. The EXDC has no manual controls and can only be operated through the logic interface. To operate the EXT pump. Edwards E1M28 and E2M18 Instruction Manual (0) Edwards E2M and E2M Instruction www.doorway.ru ( MB) Edwards E2M28 E2M30 Instruction Manual Issue T (0) Edwards EXT70H EXT70H1 EXTH EXTHi Turbo www.doorway.ru ( MB) Edwards EXCE EXCL Turbo Pump www.doorway.ru ( MB).

Edwards EXT70H Turbomolecular Vacuum Pump - REBUILT The Edwards EXT turbomolecular and compound molecular pumps provide a reliable, hydrocarbon-free high and ultra high vacuum. Utilizing multi-stage axial flow turbines combined with magnetic and ceramic bearings, the EXT design provides oil and vibration free operation with minimal maintenance on high critical foreline pressure processes. The EXDC controls the electrical supply for a BOC Edwards EXT70, EXT70H, EXT, EXTH, EXT or EXT turbomolecular pump. The EXDC has no manual controls and can only be operated through the logic interface. To operate the EXT pump, you must therefore connect the EXDC to your own control equipment and electrical supply (see Figure 3). pump is an EXT70H/ISO63 pump fitted with an interstage-port accessory: see Section 7. The EXT Compound Molecular Pumps are designed for use with a BOC Edwards EXC Turbomolecular Pump Controller (abbreviated to EXC Controller in the remainder of this manual)oranEXDCTurbomolecularPumpDriveModule(abbreviatedtoEXDCDriveModule.

This manual provides installation, operation and maintenance instructions for the BOC. Edwards EXT70H, EXT70Hi, EXTH and EXTHi Compound Molecular Pumps. trap. For more information, refer to the LTQ XL Hardware Manual. ETD Module Turbopump. A separate turbopump (Edwards EXT70H) provides the high vacuum. The Edwards EXT70H turbomolecular and compound molecular pumps provide a reliable, hydrocarbon-free high and ultra-high vacuum.